| 摘要 |
PROBLEM TO BE SOLVED: To provide a handler which can be downsized.SOLUTION: A handler according to the prevention includes a support 94, a holder 98, and a position change mechanism portion 700 which is disposed between the support 94 and the holder 98, and changes the position of an IC chip 100 held by the holder 98 with respect to the support 94. The position change mechanism portion 700 includes a first movement portion 95 provided movably in an X direction with respect to the support 94, a second movement portion 96 provided movably in a Y direction with respect to the first movement portion 95, a first piezoelectric actuator 200 which moves the first movement portion 95 with respect to the support 94, and a second piezoelectric actuator 300 which moves the second movement portion 96 with respect to the first movement portion 95. In addition, the first piezoelectric actuator 200 is provided in the first movement portion 95 or the second piezoelectric actuator 300 is provided in the second movement portion 96. |
