发明名称 |
ダイヤモンドNV光学中心を有するダイヤモンド単結晶 |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a diamond single crystal having NV optical centers arranged in a desired size and/or shape on a desired surface and/or in a space in a crystal, and NV optical centers automatically arranged in a desired size and/or shape on a desired surface and/or in space in a crystal during growing a diamond without a post-process, using a CVD method capable of growing a high quality diamond single crystal.SOLUTION: A diamond single crystal 2 having nitrogen-vacancy compound defects 1 automatically arranged on a surface of the crystal and/or in a space of the crystal during crystal growth of a diamond by homoepitaxial growth is manufactured by controlling and growing the diamond in a step flow mode at a crystal growth rate of 50 nm/h or less using a microwave plasma CVD method after forming variation of a local off-angle on a diamond single crystal substrate using the substrate having an off-angle of 0° or more and 0.5° or less as a substrate. |
申请公布号 |
JP6037387(B2) |
申请公布日期 |
2016.12.07 |
申请号 |
JP20130040653 |
申请日期 |
2013.03.01 |
申请人 |
国立研究開発法人産業技術総合研究所 |
发明人 |
渡邊 幸志;鹿田 真一;梅澤 仁;石川 豊史;伊藤 公平;富澤 周平;大橋 康平;早瀬 潤子 |
分类号 |
C30B29/04;C01B31/06;C23C16/27;C23C16/511;H01L21/205 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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