SUBSTRATE TRANSFER SYSTEM AND METHOD

摘要

The end effector (5) has a first hand (8) and a second hand (9) which can be driven independently from each other. The first hand (8) has a hand body (10) which can be inserted between vertically adjacent substrates stored in a substrate storing portion, holding a substrate (S) immediately above or immediately below the hand body (10). The second hand (9) has a hand base portion (11) which at least partially advances below a lowermost substrate (S) or above an uppermost substrate (S) of a plurality of substrates (S) stored in a substrate storing portion and a substrate holding means (12) provided to the hand base portion (11) so as to hold two or more substrates (S) including the lowermost substrate (S) or the uppermost substrate (S). By the end effector (5), substrates can be conveyed without any problem even when use of a batch conveying type hand is restricted due to the condition on the substrate storing portion side.