发明名称 METHOD AND APPARATUS FOR DEPOSITION USING AN ATMOSPHERIC PRESSURE PLASMA.
摘要 An apparatus may comprise a plasma deposition unit, a movement system, and a mesh system. The plasma deposition unit may be configured to generate a plasma. The movement system may be configured to move a substrate under the plasma deposition unit. The mesh system may be located between the plasma deposition unit and the substrate in which a mesh may comprise a number of materials for deposition onto the substrate and in which the plasma passing through the mesh may cause a portion of the number of materials from the mesh to be deposited onto the substrate.
申请公布号 EP2773791(B1) 申请公布日期 2016.12.07
申请号 EP20120795883 申请日期 2012.10.01
申请人 The Boeing Company 发明人 MATOS, Marvi A.;PINGREE, Liam S.
分类号 C23C14/22;C23C14/46;C23C14/56;H01J37/32;H01J37/34 主分类号 C23C14/22
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