发明名称 |
METHOD AND APPARATUS FOR DEPOSITION USING AN ATMOSPHERIC PRESSURE PLASMA. |
摘要 |
An apparatus may comprise a plasma deposition unit, a movement system, and a mesh system. The plasma deposition unit may be configured to generate a plasma. The movement system may be configured to move a substrate under the plasma deposition unit. The mesh system may be located between the plasma deposition unit and the substrate in which a mesh may comprise a number of materials for deposition onto the substrate and in which the plasma passing through the mesh may cause a portion of the number of materials from the mesh to be deposited onto the substrate. |
申请公布号 |
EP2773791(B1) |
申请公布日期 |
2016.12.07 |
申请号 |
EP20120795883 |
申请日期 |
2012.10.01 |
申请人 |
The Boeing Company |
发明人 |
MATOS, Marvi A.;PINGREE, Liam S. |
分类号 |
C23C14/22;C23C14/46;C23C14/56;H01J37/32;H01J37/34 |
主分类号 |
C23C14/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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