PIEZOELECTRIC ELEMENT AND INK JET PRINTING HEAD

摘要

A piezoelectric element is provided which includes a piezoelectric layer (70) formed of perovskite potassium sodium niobate by chemical solution deposition on a first electrode (60), and a second electrode (80) provided thereon. Voids (75) are included in the piezoelectric layer such that a difference between the maximum value and the minimum value of void dimensions (w) in film thickness direction (Z) is equal to or smaller than 14 nm, and the maximum value is equal to or smaller than 24 nm in cross-sectional SEM image.