发明名称 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法
摘要 The present invention provides a salt represented by the formula (I): wherein Q1 and Q2 independently each represent a fluorine atom or a C1-C6 perfluoroalkyl group, L1 represents a C1-C17 divalent saturated hydrocarbon group in which one or more -CH2- can be replaced by -O- or -CO-, L2 represents a single bond or a C1-C6 alkanediyl group in which one or more -CH2- can be replaced by -O- or -CO-, Y represents a C3-C18 alicyclic hydrocarbon group which can have one or more substituents, and one or more -CH2- in the alicyclic hydrocarbon group can be replaced by -O-, -CO- or -SO2-, and Z+ represents an organic counter ion.
申请公布号 JP6039194(B2) 申请公布日期 2016.12.07
申请号 JP20120037200 申请日期 2012.02.23
申请人 住友化学株式会社 发明人 市川 幸司;坂本 宏;安江 崇裕
分类号 C07C309/12;C07C309/17;C07C381/12;C07D303/16;C07D305/06;C07D327/04;G03F7/004;G03F7/039;H01L21/027 主分类号 C07C309/12
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