| 摘要 |
<p>PROBLEM TO BE SOLVED: To execute efficient and sufficiently enough cooling even at the time of high output. SOLUTION: This optical reflection moirror 100 is equipped with a mirror 1 to reflect laser beams R, a holder 2 to hold this mirror 1, a mirror block 3 provided on the rear surface of the mirror 1, and a first cooling water passage 4 formed in this mirror block 3 and constantly cooling the mirror 1. The cooling water is cooled at a level of room temperature by a fan of a cooling device and a heat exchanger. Further, in the mirror block 3 a second cooling water passage 5 is formed, which is formed behind the first cooling water passage 4 against the mirror 1. When the mirror is overheated, cooling water is made to flow in the second cooling water passage 5. This cooling water is cooled down to a temperature lower than the room temperature, e.g. to 10 deg.C.</p> |
