有機層蒸着装置及びこれを用いる有機発光表示装置の製造方法

摘要

An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck (600) that fixedly supports a substrate (500) that is a deposition target; a deposition unit (730) including a chamber (731) maintained at a vacuum and an organic layer deposition assembly (100) for depositing an organic layer (63) on the substrate (500) fixedly supported by the electrostatic chuck (600); and a first conveyer unit (610) for moving the electrostatic chuck (600) fixedly supporting the substrate (500) into the deposition unit (730), wherein the first conveyer unit (610) passes through inside the chamber (731), and the first conveyer unit (610) includes a guide unit (614) having a receiving member for supporting the electrostatic chuck (600) to be movable in a direction.