INK-JET PRINTHEAD BY USING PIEZOELECTRIC EFFECT AND PRODUCING METHOD THEREOF

摘要

PURPOSE: An ink-jet print head and its producing method are provided to integrate a nozzle and an ink channel and to prevent the reverse flow of the ink as much as possible when the ink is vented. CONSTITUTION: SiO2 thin films(10,12) are formed on both face of a Si PCB(11) formed with a space for a chamber so as to form a pressure chamber(1), an ink feed-in channel(3) and a common ink channel(4), and a Si thin film(13) and a SiO2 thin film(14) are formed on the SiO2 thin film(12) so as to from a nozzle(2). Herein, a Si vibration plate(9) for generating pressure so the ink in the pressure chamber as to be vented through a nozzle is formed on a surface facing the nozzle, and a piezoelectric device is attached so that a vibration plate(9) is vibrated on the upper face of the Si vibration plate. Herein, a piezoelectric plate(7) is produced with a PbZrTi(lead zirconium titanate) compound, especially, Pb(ZrxTi1-x)O3.