Process of optimisation of a monolithic photodiode chip

摘要

Photodiode chip of high threshold frequency has a conduction transfer zone from an active photodiode region of a photo-diode-mesa to the output-pad of a HF output of the photo-diode chip. The connection from the photo-diode-mesa to the output-pad is achieved with a high-resistance conduction/line with an impedance (Z line) distributed over its length and which is at least as high as the effective load impedance (Z load) at the output-pad.