| 摘要 |
A method of qualitative and quantitative elemental analysis of a sample is carri ed out by first energising an anode containing the or one of the elements or a compound th ereof energising the pure element anode or compound anode with a pulsed e-beam and obtaining a spectrum of the produced X-ray beam, and then energising the sample to be analysed with pulsed x-ray beam, obtaining a spectrum of the produced X-ray beam and superimposing it between the zero line and the spectrum of the pure element or compound, and comparing the spectra for qualitative similarity, and, if similar, determining the relative concentration of the element or compound in the sample by direct measurement on the superimposed spectra, calibrating said data by subtrac ting the resolution/energy response function used as a zero line of the pure element or c ompound.
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