摘要 |
<p>PROBLEM TO BE SOLVED: To remove a coating film without using chemicals by emitting a laser beam to a surface of an object to be processed fromed with the film on its surface by using an energy density veritable optical system of the beam on the surface of the object, and removing an upper layer part of the film by ablation. SOLUTION: A laser beam entering a laser emitting head 10 is emitted to a surface of an object 1 to be processed, and a coated surface is removed by ablation. When energy density of the beam on the surface of the object 1 is excessively low, the film is not ablated. Meanwhile, when it is excessively high, substrate material of the film is damaged. Accordingly, the energy density of the beam is set to a range that the substrate material is not damaged but ablated. And, the height from the surface of the object 1 to a condenser lens is adjusted by a condenser lens supporting mechanism to alter an emitting area, thereby regulating the density.</p> |