| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device which can detect a defect on a surface of a member having fine recessed and projecting parts on the surface.SOLUTION: A device for inspecting a defect on a surface of an inspection object S comprises light projecting means 10 for emitting light to the inspection object S and photographing means 20 provided with a light receiving element 21s for receiving light reflected from the surface of the inspection object S. The light projecting means 10 includes a light source 11 and a light shielding member 15 which is disposed between the light source 11 and the inspection object S and limits the light emitted from the light source 11 to the inspection object S. The light shielding member 15 includes slits 15h transmitting light emitted from the light source 11. The slits 15h are formed in such a manner that when the surface of the inspection object S is a flat surface, the direction of the optical axis of light passing through the slits and reflecting on the surface of the inspection object and the direction of the optical axis of a light receiving part of the photographing means are coaxial. |
