Package for a differential pressure sensing die

摘要

A differential pressure sensor includes a pressure sensing die comprising a semiconductor die, having a thinned portion forming a diaphragm. The diaphragm includes piezo-resistive elements that exhibit varying resistance based on force exerted on the diaphragm. A first support structure is bonded to a first surface of the semiconductor die, having an aperture defined through the support structure such that a first surface of the diaphragm is exposed through the aperture. A second support structure is bonded to the opposite side of the semiconductor die having an aperture aligned with the opposing side of the diaphragm. Electrical components in electrical communication with the piezo-resistive elements are arranged outside the region defined by the bond between the first and second support structures and the semiconductor die. An oil-filled volume may be defined between the semiconductor die and a harsh medium which transmits a fluid pressure to the die without the harsh medium contacting the die.

主权项

1. A package for receiving a differential pressure sensing die, the differential pressure sensing die comprising a semiconductor die having an integral diaphragm adapted to measure a differential pressure applied to opposing sides of the integral diaphragm, the package comprising:
a first housing member configured to receive the differential pressure sensing die, the first housing member defining a chamber and supporting a first flexible diaphragm that divides the chamber into a first internal volume and a first fluid-fillable volume, the first fluid-fillable volume in fluid communication with a first side of the integral diaphragm of the differential pressure sensing die when the differential pressure sensing die is installed in the package; at least one second housing member, the at least one second housing member defining a second chamber and supporting a second flexible diaphragm that divides the second chamber into a second internal volume and a second fluid-fillable volume, the second fluid-fillable volume in fluid communication with a second side of the integral diaphragm of the differential pressure sensing die when the differential pressure sensing die is installed in the package, wherein the first housing member and the at least one second housing member are configured to mate with one another to define a housing, the housing defining a first central portion in which the first housing member and the second housing member directly contact one another and a second central portion defining a third internal volume for receiving the differential pressure sensing die, the first housing member having a first internal port defined in a wall of the first housing member at the second central portion and the second housing member having a second internal port defined in a wall of the second housing member at the second central portion, the internal ports being arranged to mate with the pressure sensing die, the respective walls attached directly to the differential pressure sensing die when the differential pressure sensing die is received by the third internal volume, and wherein the first housing member supports the first flexible diaphragm and the second housing member supports the second flexible diaphragm independent of the first housing member when the first housing member and the second housing member are not mated; a first port defined through a first wall of the first housing member, the first port in fluid communication with the first internal volume; and a second port defined through a second wall of one of the at least one second housing members, the second port in fluid communication with the second internal volume, wherein the first port is configured to receive a first fluid at a first pressure and the second port is configured to receive a second fluid at a second pressure.