发明名称 |
Electroacoustic components and methods thereof |
摘要 |
An improved electroacoustic component is provided. The component includes a carrier wafer with a passivation layer, a piezoelectric layer above the passivation layer and an interdigitated transducer in an electrode layer on the piezoelectric layer. The component is configured to work with a shear mode. |
申请公布号 |
US9596546(B2) |
申请公布日期 |
2017.03.14 |
申请号 |
US201214652092 |
申请日期 |
2012.12.12 |
申请人 |
Epcos AG |
发明人 |
Perois Xavier;Ballandras Sylvain Jean |
分类号 |
H03H9/02;H04R17/00;H04R1/00 |
主分类号 |
H03H9/02 |
代理机构 |
Slater Matsil, LLP |
代理人 |
Slater Matsil, LLP |
主权项 |
1. An electroacoustic component comprising:
a carrier wafer with a passivation layer; a piezoelectric layer disposed above the passivation layer; and an interdigitated transducer in an electrode layer disposed on the piezoelectric layer, wherein the electroacoustic component is configured to work with a shear mode. |
地址 |
Munich DE |