发明名称 Electroacoustic components and methods thereof
摘要 An improved electroacoustic component is provided. The component includes a carrier wafer with a passivation layer, a piezoelectric layer above the passivation layer and an interdigitated transducer in an electrode layer on the piezoelectric layer. The component is configured to work with a shear mode.
申请公布号 US9596546(B2) 申请公布日期 2017.03.14
申请号 US201214652092 申请日期 2012.12.12
申请人 Epcos AG 发明人 Perois Xavier;Ballandras Sylvain Jean
分类号 H03H9/02;H04R17/00;H04R1/00 主分类号 H03H9/02
代理机构 Slater Matsil, LLP 代理人 Slater Matsil, LLP
主权项 1. An electroacoustic component comprising: a carrier wafer with a passivation layer; a piezoelectric layer disposed above the passivation layer; and an interdigitated transducer in an electrode layer disposed on the piezoelectric layer, wherein the electroacoustic component is configured to work with a shear mode.
地址 Munich DE