Ion beam irradiation device

摘要

An ion beam irradiation device includes a vacuum chamber that accommodates a transport tray which holds a substrate, a transport unit that transports the transport tray in the vacuum chamber in a transport direction, an ion beam irradiation unit that irradiates, with ion beams, a predetermined irradiation position in the vacuum chamber, and a position detector that detects a position of the transport tray. The transport tray includes a plurality of indices that are arranged in the transport direction to indicate portions of the transport tray. The position detector images each of the indices at a predetermined imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged index.

主权项

1. An ion beam irradiation device comprising:
a vacuum chamber that accommodates a transport tray which holds a substrate; a transport unit that transports the transport tray along a transport line in the vacuum chamber in a transport direction; an ion beam irradiation unit that includes an ion source, wherein the ion source is fixed to the vacuum chamber to irradiate, with ion beams, an irradiation position that is defined in the vacuum chamber; and a position detector that is fixed to the vacuum chamber to detect a position of the transport tray, wherein the transport tray includes a plurality of indices, the plurality of indices being a plurality of barcodes that are located in the transport tray and arranged entirely from one end to the other end of the transport tray in the transport direction to indicate portions of the transport tray, and each of the plurality of barcodes being formed by bars that are each printed in a direction parallel to the transport direction, the position detector images each of the plurality of barcodes at a fixed imaging position, which is positioned in the vacuum chamber, when the transport tray reaches the imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged barcode, and the position detector and the ion source are located at opposite sides of the transport line.