Gas line weldment design and process for CVD aluminum

摘要

A system of gas lines for a processing chamber and a method of forming a gas line system for a processing chamber are provided. The system of gas lines includes electropolished multi-way valves that connect electropolished linear gas lines. By using multi-way valves rather than tee-fittings and electropolishing the linear gas lines, the nucleation of contaminating particles in the system of gas lines may be reduced.

主权项

1. A method of forming a gas line system for a processing chamber, comprising:
obtaining one or more electropolished valves that are three-way valves or higher and comprise outputs, wherein each output of each valve is welded to a flange connector, and one or more electropolished linear gas lines, wherein each of the electropolished linear gas lines comprises:
a first end;a second end;a first flange connector welded to the first end;a second flange connector welded to the second end; and then joining at least one of the electropolished valves to at least one of the electropolished linear gas lines by coupling one of the flange connectors on the at least one electropolished valve to the first flange connector on the at least one electropolished linear gas line, wherein the gas line system consists essentially of the one or more electropolished valves, the flange connectors, and the one or more electropolished as lines.