Showerhead having cooling system and substrate processing apparatus including the showerhead

摘要

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having an opened upper side, the chamber body providing an inner space in which processes with respect to a substrate are performed, a chamber lid disposed on an upper portion of the chamber body to close the opened upper side of the chamber body, and a showerhead disposed on a lower portion of the chamber lid to supply a reaction gas into the inner space. The showerhead includes a flange contacting the chamber lid, the flange having a passage recessed from a top surface of the flange to allow a refrigerant to flow therein, and a flat plate disposed inside the flange, the flat plate having at least one injection hole for injecting the reaction gas in a thickness direction thereof.

主权项

1. A substrate processing apparatus comprising:
a chamber body having an opened upper side, the chamber body providing an inner space in which processes with respect to a substrate are performed; a showerhead disposed on an upper portion of the chamber body to close the opened upper side of the chamber body, wherein the showerhead supplies a reaction gas into the inner space; and a chamber lid disposed on an upper portion of the showerhead, wherein the showerhead comprises: a ring-shaped flange contacting a lower surface of the chamber lid and a top surface of the chamber body, the flange having a passage recessed from a top surface of the flange to allow a refrigerant to flow therein; a flat plate disposed inside the flange and spaced from the lower surface of the chamber lid, the flat plate having at least one injection hole for injecting the reaction gas in a thickness direction thereof; and a sealing member disposed between the chamber lid and the flange, wherein the sealing member is disposed radially inward of the passage.