Analyzing apparatus and calibration method

摘要

In an analyzing apparatus for analyzing compositions using a fluorescent X-ray in the atmosphere, a calibration to eliminate influences caused by a time-dependent change is performed. The analyzing apparatus includes an emission unit, a detection unit, an environment measurement unit, and a time-dependent change calculation unit. The emission unit emits a primary X-ray. The detection unit detects an intensity of a secondary X-ray passing through the atmosphere. The environment measurement unit measures an environment parameter defining the atmosphere. The time-dependent change calculation unit calculates a time-dependent change of the intensity of the secondary X-ray between a first timing and a second timing, based on a first environment parameter, a first intensity of the secondary X-ray, a second environment parameter, and a second intensity of the secondary X-ray.

主权项

1. An analyzing apparatus for analyzing compositions of particulate matter based on a fluorescent X-ray generated from the particulate matter, the analyzing apparatus comprising:
an emission unit configured to emit a primary X-ray in the atmosphere, the primary X-ray exciting the particulate matter to generate the fluorescent X-ray; a detection unit configured to detect a secondary X-ray generated by emitting the primary X-ray and passing through the atmosphere; an environment measurement unit configured to measure an environment parameter comprising at least one of temperature, pressure, and humidity defining the atmosphere; and a time-dependent change calculation unit configured to calculate a time-dependent change or a rate of the time-dependent change between intensities of the secondary X-rays detected at a first timing and at a second timing, based on a first environment parameter, a first intensity of the secondary X-ray, a second environment parameter, and a second intensity of the secondary X-ray, wherein the first timing is the timing after the elapse of a predetermined period from the second timing, the first environment parameter is measured at the first timing by the environment measurement unit, the first intensity of the secondary X-ray is an intensity of the secondary X-ray detected at the first timing by the detection unit, the second environment parameter is measured at the second timing by the environment measurement unit, and the second intensity of the secondary X-ray is an intensity of the secondary X-ray detected at the second timing by the detection unit.