Multi charged particle beam writing method, and multi charged particle beam writing apparatus

摘要

A multi-beam writing method includes irradiating a target object with a multi-beam each being one of beams of irradiation time periods of a set of irradiation steps corresponding to writing processing concerned of plural writing processing of the multi-pass writing, for each writing processing of the multi-pass writing, using each set of irradiation steps, obtained by dividing entire irradiation steps of all the number of writing times of a beam concerned into a predetermined digit number irradiation steps to be set as an irradiation time obtained by multiplying a corresponding second gray scale by a quantization unit, as a set of irradiation steps of one of the plural writing processing of the multi-pass writing, wherein the corresponding second gray scale is one of plural second gray scales defined in decimals converted from each digit value of a binary number of a predetermined digit number.

主权项

1. A multi charged particle beam writing method comprising:
forming multiple charged particle beams from a charged particle beam; obtaining a first gray scale value by dividing a total irradiation time of the multiple charged particle beams that irradiate a same position of a target object by a quantization unit when performing multi-pass writing using the multiple charged particle beams; converting the first gray scale value into a binary number having a predetermined number of digits; setting a number of irradiation steps equal to the predetermined number of digits; converting each digit of the binary number into an irradiation step duration value for a corresponding one of the irradiation steps, each irradiation step duration value obtained by multiplying a corresponding digit of the binary number by the quantization unit and by a decimal number corresponding to the digit position in the binary number; and irradiating the target object with the number of irradiation steps equal to the predetermined number of digits, where the target object is irradiated by the multiple charged particle beams that irradiate the same position of the target object for the irradiation step duration value for each corresponding irradiation step.