MEMS microphone with spring suspended backplate

摘要

A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.

主权项

1. A MEMS microphone comprising:
a base; a diaphragm supported by diaphragm springs; a backplate having a static backplate, springs and trenches, the trenches configured to create an active sensing area located radially inward from the trenches, the trenches effectively isolating the active sensing area from the static backplate and the backplate springs, the backplate springs configured to support the backplate on the base; a diaphragm having diaphragm springs,wherein the backplate springs are fabricated so that the backplate remains substantially unaffected upon receipt of an anticipated incident audio signal of normal intensity, where a spring constant of the backplate springs is substantially greater than a spring constant of the diaphragm springs or a collective spring constant of the backplate springs is greater than a collective spring constant of the diaphragm springs.