发明名称 |
PROCEDE DE FORMATION DE RIDES PAR FUSION D'UNE FONDATION SUR LAQUELLE REPOSE UNE COUCHE CONTRAINTE |
摘要 |
A pressure-sensitive sensor including a substrate supporting a piezoelectric layer of a piezoelectric material. The piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor. The piezoelectric layer is sandwiched between two electrodes for collecting charges generated by deformation of the piezoelectric layer. |
申请公布号 |
FR3012255(B1) |
申请公布日期 |
2017.03.10 |
申请号 |
FR20130060110 |
申请日期 |
2013.10.17 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES |
发明人 |
BENAISSA LAMINE;MOULET JEAN-SEBASTIEN |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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