| 发明名称 |
FRONTSIDE COUPLED WAVEGUIDE WITH BACKSIDE OPTICAL CONNECTION |
| 摘要 |
A method of manufacturing a device includes forming an optical coupler having a first end contacting a front side of a semiconductor substrate and a second end contacting an optical waveguide on an insulator layer on the substrate. The optical coupler is curved between the first end and the second end. The optical coupler is configured to change a direction of travel of light from a first direction at the first end to a second direction at the second end. |
| 申请公布号 |
US2017068052(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201514844327 |
申请日期 |
2015.09.03 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
Amoah Yoba;Brown Brennan J.;Ellis-Monaghan John J.;Kreider Ashleigh R. |
| 分类号 |
G02B6/30;G02B6/26;G02B6/125;G02B6/32 |
主分类号 |
G02B6/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a device, comprising:
forming an optical coupler having a first end contacting a front side of a semiconductor substrate and a second end contacting an optical waveguide on an insulator layer on the substrate; and forming a curved spacer on the front side of the substrate and contacting a sidewall of the optical waveguide and a sidewall of the insulator layer, wherein: the optical coupler is curved between the first end and the second end, and the optical coupler is configured to change a direction of travel of light from a first direction at the first end to a second direction at the second end. |
| 地址 |
Armonk NY US |
