| 发明名称 |
Substrate Carrier System for Moving Substrates in a Vertical Oven and Method for Processing Substrates |
| 摘要 |
A substrate carrier system for carrying substrates to a vertical oven and a vertical oven are disclosed. In an embodiment, the system includes a substrate carrier configured to carry a plurality of substrates and a substrate carrier support structure configured to be inserted along an insertion direction into the vertical oven, and to receive the substrate carrier in a direction substantially orthogonal to the insertion direction into a holding position in the substrate carrier support structure. |
| 申请公布号 |
US2017067158(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615356160 |
申请日期 |
2016.11.18 |
| 申请人 |
Infineon Technologies AG |
发明人 |
Stefaner Andreas;Schieder Heimo;Denifl Guenter;Moennich Roland;Winkler Anton Gernot |
| 分类号 |
C23C16/458;H01L21/673;H01L21/677;H01L21/02 |
主分类号 |
C23C16/458 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate carrier system for carrying substrates to a vertical oven, the substrate carrier system comprising:
a substrate carrier configured to carry a plurality of substrates; and a substrate carrier support structure configured to be inserted along an insertion direction into the vertical oven, and to receive the substrate carrier in a direction substantially orthogonal to the insertion direction into a holding position in the substrate carrier support structure. |
| 地址 |
Neubiberg DE |
