发明名称 |
PURGING DEVICE, PURGING STOCKER, AND PURGING METHOD |
摘要 |
[Problem] To provide a purging device that can appropriately perform purging while also conserving a purge gas. [Solution] A purging device (4) that is provided with: a first purging nozzle (41) that supplies a purge gas (G1) to a container (F) that is a purging target; an internal-state detection unit (8) that detects the internal state of the container before the first nozzle begins a purging process; and a purge determination unit (48) that, on the basis of detection results from the internal-state detection unit, determines purging conditions for the container. |
申请公布号 |
WO2017038269(A1) |
申请公布日期 |
2017.03.09 |
申请号 |
WO2016JP70855 |
申请日期 |
2016.07.14 |
申请人 |
MURATA MACHINERY, LTD. |
发明人 |
MURATA, Masanao;YAMAJI, Takashi |
分类号 |
H01L21/673;B65G1/00 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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