发明名称 PURGING DEVICE, PURGING STOCKER, AND PURGING METHOD
摘要 [Problem] To provide a purging device that can appropriately perform purging while also conserving a purge gas. [Solution] A purging device (4) that is provided with: a first purging nozzle (41) that supplies a purge gas (G1) to a container (F) that is a purging target; an internal-state detection unit (8) that detects the internal state of the container before the first nozzle begins a purging process; and a purge determination unit (48) that, on the basis of detection results from the internal-state detection unit, determines purging conditions for the container.
申请公布号 WO2017038269(A1) 申请公布日期 2017.03.09
申请号 WO2016JP70855 申请日期 2016.07.14
申请人 MURATA MACHINERY, LTD. 发明人 MURATA, Masanao;YAMAJI, Takashi
分类号 H01L21/673;B65G1/00 主分类号 H01L21/673
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