| 摘要 |
PROBLEM TO BE SOLVED: To reduce manufacturing cost and assure easy assembling by providing a sufficient number of strips to almost continuously provide a thermal conductive junction regions with respect to the thermal shield, substantially surrounding a neck tube of a service turret. SOLUTION: An internal shield 11 and external shield 12 are provided in the isolating condition between an external shell 7 and a housing 1, forming an external wall of the vacuum chamber. Moreover, in the cooling mount, namely in the uni-socket, a refrigerator is coupled to the thermal shields 11 and 12 for the purpose of cooling. A service turret 15, having a neck portion 16 is provided, and the neck portion 16 is provided through the thermal shields 11, 12 and an external wall of a housing 1. The laminated copper strips 26 and 27 respectively couple thermally the thermal shields 11 and 12 to the neck tube 16. Here, eight strips are used to completely surround the neck tube 16. |
