| 摘要 |
A sensor module for connection between a fabrication tool and the head of the fabrication tool. It comprises an interface connectable to the fabrication tool, comprising: a power port for receiving power transmitted by the fabrication tool to the head, a gas port for receiving gas delivered by the fabrication tool to the head, and another interface connectable to the head which comprises another power port for delivering power to the head, another gas port for delivering gas, from the first gas port, to the head. The module also has a sensor module comprising a memory, a sensor for measuring power transmitted to the head, another sensor for measuring the gas delivered to the head, means for transmitting information between the sensor module and a remote location, and a processor electronically connected to the memory, transmission means, and sensors. |
