| 发明名称 |
CHUCK ASSEMBLY WITH TILTABLE CHUCK AND SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME |
| 摘要 |
A chuck assembly includes a chuck to hold a substrate, and a pillar coupled to the chuck to support the chuck, an axis of the pillar passing through a center of the pillar in a longitudinal direction of the pillar, wherein the chuck has a top surface, which is inclined with respect to the axis of the pillar, the top surface of the chuck being precessionally rotatable about the axis of the pillar. |
| 申请公布号 |
US2017069526(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615170151 |
申请日期 |
2016.06.01 |
| 申请人 |
PARK Jongsoon;KIM Jong-Kyu;OH Jung-Ik;KIM Sang-Kuk;PARK Jongchul |
发明人 |
PARK Jongsoon;KIM Jong-Kyu;OH Jung-Ik;KIM Sang-Kuk;PARK Jongchul |
| 分类号 |
H01L21/687;H01J37/305;H01L21/263 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A chuck assembly, comprising:
a chuck to hold a substrate; and a pillar coupled to the chuck to support the chuck, an axis of the pillar passing through a center of the pillar in a longitudinal direction of the pillar, wherein the chuck has a top surface, which is inclined with respect to the axis of the pillar, the top surface of the chuck being precessionally rotatable about the axis of the pillar. |
| 地址 |
Suwon-si KR |
