| 发明名称 |
TABLE DEVICE, MEASURING DEVICE, MACHINE TOOL, AND SEMICONDUCTOR MANUFACTURING DEVICE |
| 摘要 |
A table device includes: a first table that includes a first upper surface; a second table that is arranged on one side of the first table in a first axial direction parallel to a first axis in a predetermined plane and includes a second upper surface; a first guiding device that guides the first table in the first axial direction; and a second guiding device that guides the second table in the first axial direction. The first and second guiding devices are arranged in a second axial direction parallel to a second axis in the predetermined plane, the second axis being perpendicular to the first axis. |
| 申请公布号 |
US2017069525(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201515122665 |
申请日期 |
2015.03.02 |
| 申请人 |
NSK Ltd. |
发明人 |
FUJITA Daisuke |
| 分类号 |
H01L21/687;H01L21/68;H01L21/67 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A table device comprising:
a first table that includes a first upper surface; a second table that is arranged on one side of the first table in a first axial direction parallel to a first axis in a predetermined plane and includes a second upper surface; a first guiding device that guides the first table in the first axial direction; and a second guiding device that guides the second table in the first axial direction, wherein the first and second guiding devices are arranged in a second axial direction parallel to a second axis in the predetermined plane, the second axis being perpendicular to the first axis. |
| 地址 |
Tokyo JP |
