| 摘要 |
This plasma irradiation device 10 comprises a main unit 12, a pair of electrodes 14, 16, a gas supply device 20, and a laser irradiation device 22. The gas supply device 20 supplies treatment gas to inside the main unit 12. Treatment gas that flows through the inside of a cylinder section 23 of the main unit 12 is converted into plasma by voltage being applied to the electrodes 14, 16 and electrical discharge occurring between the electrodes 14, 16. As a result, plasma is ejected in the axial direction of the cylinder section 23 from an opening in an end surface of the cylinder section 23, said end surface being on the opposite side to an end surface on the side that the laser irradiation device 22 is connected to. The laser irradiation device 22 irradiates laser light in the axial direction of the cylinder section 23. As a result, the plasma irradiation position can be visually checked by laser light and plasma can be appropriately irradiated on an object to be treated. |
