ORGANIC LIGHT EMITTING DEVICE AND MANUFACTURING METHOD OF THE SAME USING THIN FILM FABRICATING APPARATUS

摘要

A thin film fabricating apparatus includes an electrode part which sprays a thin film material as electrified spray particles, a substrate holder disposed facing the electrode part and holding a substrate to be provided with a thin film, and a mask disposed between the electrode part and the substrate holder and provided with a plurality of pattern grooves, where the mask and the substrate are applied with a mask voltage (Vm) and a substrate voltage (V0), respectively, the mask voltage (Vm) is a variable voltage, and the substrate voltage (V0) has the same polarity as the polarity of spray particles.

主权项

1. A thin film fabricating apparatus comprising:
an electrode part which sprays a thin film material as electrified spray particles; a substrate holder which faces the electrode part and holds a substrate provided with a thin film; and a mask disposed between the electrode part and the substrate holder and provided with a plurality of pattern grooves, wherein the mask and the substrate are applied with a mask voltage (Vm) and a substrate voltage (V0), respectively, the mask voltage (Vm) is a variable voltage, and the substrate voltage (V0) has the same polarity as the polarity of the spray particles.