| 摘要 |
<p>PROBLEM TO BE SOLVED: To precisely control the internal dimension of cavity through a substrate and the entire flatness of substrate by functioning an insert material as a die for maintaining the cross-sectional area dimension of respective openings of individual ceramic sheets during a press stage. SOLUTION: The cross-sectional area of an insert material 40 is made a little smaller than the cross-sectional area of openings on layers 10-16, so that the ceramic materials of respective layers can flow toward the insert material 40 during lamination work. Then, the insert material 40 is operated as an inner die of a cavity 24, and the dimension of shelves 26-32 is maintained during the lamination work. Then, the sputter of ceramic layer is compressed on temperature and pressure conditions suitably for letting the ceramic materials flow between plates 56 and 58 together with the insert material 40 in the cavity 24. The ceramic materials of adjacent layers flow together and are laminated. The ceramic materials flow toward the insert material 40 while bypassing its surrounding as well. Therefore, since all the layers are simultaneously and uniformly laminated, the layers hardly warp.</p> |
