| 摘要 |
A control means (12) of this substrate conveyance robot (1) causes a robot arm (4) and a substrate holding device (7) to perform a blade member entering motion, a substrate receiving motion, and a substrate mounting motion. The substrate holding device (7) is configured to be switchable between: a first operation state in which a pair of blade members (25, 26) are arranged in the vertical direction; and a second operation state in which the pair of blade members (25, 26) are arranged at positions so as to be misaligned from each other in the vertical direction, and in which a single blade member is allowed to enter a substrate mounting structure. Takt time during substrate conveyance can be shortened irrespective of the type of the substrate mounting structure. |
