| 摘要 |
PURPOSE:To obtain a diamond coated member provided with adhesibility to a base material and wear resistance by closely forming a diamond coated 1st layer on a base material having fine ruggedness without gap and forming a diamond coated 2nd layer composed of diamond high in wear resistance on the surface. CONSTITUTION:The base material and the 1st layer are fitted with each other to produce anchor effect by closely forming the diamond coated 1st layer substantially without gap on the fine ruggedness part of the base material having the fine ruggedness having 0.5-5mum in opening diameter, 0.5-10mum in opening depth and <=5mum in opening interval. As the forming condition, a vapor phase synthesis of 750-950 deg.C is used by using a mixed gas composed of methane and/or carbon monoxide and gaseous hydrogen, 0.1-1mum/hr film forming speed and 1-3mum film thickness and obtained. Next, the diamond coated member is obtained by forming the diamond coated 2nd layer composed of the diamond having more higher wear resistance than that of the 1st layer at 1-2mum/hr film forming speed into 5-100mum thickness by the vapor phase synthesis with the change of the mixed gas composition to coat the surface of the 1st layer. |
