FLUORO-ALCOHOL ADDITIVES FOR ORIENTATION CONTROL OF BLOCK COPOLYMERS

摘要

A film layer comprising a high-chi (χ) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0 Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.

主权项

1. A surface active polymer (SAP) of formula (H-2):
E′-P′-E″  (H-2),wherein
E′ is a first end group, E″ is a second end group, E′ and/or E″ comprises 1-25 fluorines, and P′ is a polymer chain comprises a fluoro-alcohol repeat unit (HFA repeat unit) of formula (H-1):wherein
a′ is 1 or 2, Q″ is a linking group covalently bound to carbon 1, has a valency of a′+1, and comprises at least one carbon, and R″ is a monovalent radical selected from the group consisting of *—H, methyl (*—CH3), ethyl (*-Et), and trifluoromethyl (*—CF3).