| 发明名称 |
MEMS DEVICE, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, MANUFACTURING METHOD OF MEMS DEVICE, AND MANUFACTURING METHOD OF LIQUID EJECTING HEAD |
| 摘要 |
A MEMS device includes a first substrate; a second substrate that is disposed laminated on the first substrate; and a functional element that is disposed between the first substrate and the second substrate, in which the second substrate is smaller than the first substrate, and in planar view, an end portion of the second substrate is disposed inside an end portion of the first substrate. |
| 申请公布号 |
US2017066240(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615258028 |
申请日期 |
2016.09.07 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
HIRAI Eiju;NAGANUMA Yoichi;HAMAGUCHI Toshiaki;TAKABE Motoki |
| 分类号 |
B41J2/14;B41J2/16 |
主分类号 |
B41J2/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a first substrate; a second substrate that is disposed laminated on the first substrate; and a functional element that is disposed between the first substrate and the second substrate, wherein the second substrate is smaller than the first substrate, and in planar view, an end portion of the second substrate is disposed inside an end portion of the first substrate. |
| 地址 |
Tokyo JP |
