发明名称 FRONT OPENING SUBSTRATE CONTAINER WITH COMPRESSION LATCHES
摘要 A substrate container includes at least one container component having a latch member which is used to secure the container component to the container body. The latch member is able to maintain a secure connection between the container component and the container body during a shock event, preventing the container component from disconnecting from the container body. The latch member includes an arm configured to contact and apply a load to one or more corresponding features provided on the container portion providing a robust connection between the container component and the container body.
申请公布号 WO2017040707(A1) 申请公布日期 2017.03.09
申请号 WO2016US49760 申请日期 2016.08.31
申请人 ENTEGRIS, INC. 发明人 ANDERSEN, Christian
分类号 H01L21/673 主分类号 H01L21/673
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