| 摘要 |
PURPOSE:To provide a transparent conductive substrate for solar cell exhibiting excellent in plasma resistance even under highly reductive conditions, e.g. high substrate temperature or high power density. CONSTITUTION:The transparent conductive substrate comprises first and second different transparent conductive films 2, 3 deposited sequentially on a transparent insulating substrate 1, wherein the second transparent conductive film 3 comprises a crystalline thin film. |
