| 发明名称 |
Micro Heater and Micro Sensor |
| 摘要 |
The present invention relates to a micro heater and a micro sensor wherein an anti-etching dam is formed on the first supporting portion, and thus, the first supporting portion maintains its initial shape thereby so that the heat capacity of the first supporting portion becomes small, and temperature uniformity thereof is enhanced. |
| 申请公布号 |
US2017067842(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615247530 |
申请日期 |
2016.08.25 |
| 申请人 |
Point Engineering Co., Ltd. |
发明人 |
Ahn Bum Mo;Park Seung Ho;Byun Sung Hyun |
| 分类号 |
G01N27/12;H05B3/26;G01N33/00;H05B3/03 |
主分类号 |
G01N27/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro heater characterized in that and comprising:
a substrate having a first supporting portion; a heater electrode formed on said first supporting portion; an anti-etching dam formed on said first supporting portion and disposed near said heater electrode; and an air gap formed in the periphery of said first supporting portion. |
| 地址 |
Asan-si KR |
