发明名称 SHEET DETACHMENT DEVICE AND DETACHMENT METHOD
摘要 A sheet detachment device (10) equipped with: an adhering means (20) for adhering a detachable tape PT to an adhesive sheet (AS); a pulling means (30) for detaching the adhesive sheet (AS) from an adherend (WF) by imparting tension to the detachable tape (PT) adhered to the adhesive sheet (AS); a movement restriction means (40) for restricting movement of the adherend (WF) in the adhesive-sheet (AS) detachment direction caused by the detachment of the adhesive sheet (AS) by the pulling means (30); and a pressing means (50) for pressing in the direction of the adherend (WF) on the adhesive sheet (AS) which has been detached from the adherend (WF). Therein, one adhesive sheet (AS) is detached by selectively using the movement restriction means (40) and the pressing means (50).
申请公布号 WO2017038470(A1) 申请公布日期 2017.03.09
申请号 WO2016JP74016 申请日期 2016.08.17
申请人 LINTEC CORPORATION 发明人 TAKANO Takeshi
分类号 H01L21/683;H01L21/02 主分类号 H01L21/683
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