发明名称 SURFACE-SHAPE MEASURING DEVICE AND SURFACE-SHAPE MEASURING PROGRAM
摘要 When non-contact three-dimensional-shape measuring instruments that use probe light are used, first shape data for a measured object must be known when the operation trajectory of a measurement head is preset such that the probe light will be as perpendicular as possible when the probe light is incident on a measurement surface. A surface-shape measuring device that measures the surface shape of an object to be measured and that is provided with: a distance measuring apparatus that measures the distance to a measurement point on a surface of the object to be measured; an angle measuring apparatus that measures the slope at the measurement point on said surface; a first calculation unit that calculates basic shape data for the object to be measured on the basis of the distance measured by the distance measuring apparatus; and a second calculation unit that calculates detailed shape data for the object to be measured on the basis of the basic shape data and of the slope measured by the angle measuring apparatus.
申请公布号 WO2017038875(A1) 申请公布日期 2017.03.09
申请号 WO2016JP75506 申请日期 2016.08.31
申请人 NIKON CORPORATION 发明人 MIYAWAKI Takashi
分类号 G01B21/20;G01B11/24;G01B11/26;G01B21/22 主分类号 G01B21/20
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