发明名称 TARGET MATERIAL COATING TIP FOR LOW TEMPERATURE ATMOSPHERIC PRESSURE PLASMA APPARATUS
摘要 The present invention relates to a target material coating tip of a low temperature atmospheric pressure plasma apparatus in which an optimal material suitable for the intended use is applied to a tip from which plasma is generated so that materials are separated and activated by various radicals and high-energy electrons. The target material coating tip of a low temperature atmospheric pressure plasma apparatus comprises: a plasma generation module for generating plasma; a module expansion structure, extending from the plasma generation module, in which a plasma generation tip is disposed and which contains a target material applied to the plasma generation tip when the plasma is generated; and a plasma generating tip which is connected to the plasma generation module and is located inside the module expansion structure and is coated with a material which is separated and activated by radicals and high-energy electrons of the plasma when the plasma is generated.
申请公布号 WO2017039360(A1) 申请公布日期 2017.03.09
申请号 WO2016KR09803 申请日期 2016.09.01
申请人 PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION 发明人 KIM, Gyoocheon;LEE, Haejune;HONG, Jinwoo
分类号 H01J37/32;H05H1/24;H05H1/34 主分类号 H01J37/32
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