发明名称 |
TARGET MATERIAL COATING TIP FOR LOW TEMPERATURE ATMOSPHERIC PRESSURE PLASMA APPARATUS |
摘要 |
The present invention relates to a target material coating tip of a low temperature atmospheric pressure plasma apparatus in which an optimal material suitable for the intended use is applied to a tip from which plasma is generated so that materials are separated and activated by various radicals and high-energy electrons. The target material coating tip of a low temperature atmospheric pressure plasma apparatus comprises: a plasma generation module for generating plasma; a module expansion structure, extending from the plasma generation module, in which a plasma generation tip is disposed and which contains a target material applied to the plasma generation tip when the plasma is generated; and a plasma generating tip which is connected to the plasma generation module and is located inside the module expansion structure and is coated with a material which is separated and activated by radicals and high-energy electrons of the plasma when the plasma is generated. |
申请公布号 |
WO2017039360(A1) |
申请公布日期 |
2017.03.09 |
申请号 |
WO2016KR09803 |
申请日期 |
2016.09.01 |
申请人 |
PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION |
发明人 |
KIM, Gyoocheon;LEE, Haejune;HONG, Jinwoo |
分类号 |
H01J37/32;H05H1/24;H05H1/34 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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