发明名称 AQUEOUS COPPER PLATING BATHS AND A METHOD FOR DEPOSITION OF COPPER OR COPPER ALLOY ONTO A SUBSTRATE
摘要 The present invention relates to bisurea derivatives and their use in aqueous plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions and a bisurea derivative. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
申请公布号 WO2017037040(A1) 申请公布日期 2017.03.09
申请号 WO2016EP70365 申请日期 2016.08.30
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 BRUNNER, Heiko;KOHLMANN, Lars;WITCZAK, Agnieszka;MANN, Olivier
分类号 C25D7/12;C25D3/38 主分类号 C25D7/12
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