发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a semiconductor substrate in which a through hole is formed, a transistor formed on the upper surface side of the semiconductor substrate, a detection circuit formed on the upper surface side of the semiconductor substrate and connected to the transistor, a dielectric film covering the transistor and the detection circuit, a solder bump formed on the dielectric film, and a pad electrode having a first portion connected to an output of the detection circuit in the through hole, and a second portion connected to the first portion and provided on a lower surface of the semiconductor substrate.
申请公布号 US2017069583(A1) 申请公布日期 2017.03.09
申请号 US201615143018 申请日期 2016.04.29
申请人 Mitsubishi Electric Corporation 发明人 TSUKAHARA Yoshihiro
分类号 H01L23/66;H01L23/31;H01L25/07;H01L23/00;H01L23/528 主分类号 H01L23/66
代理机构 代理人
主权项 1. A semiconductor device comprising: a semiconductor substrate in which a through hole is formed; a transistor formed on the upper surface side of the semiconductor substrate; a detection circuit formed on the upper surface side of the semiconductor substrate and connected to the transistor; a dielectric film covering the transistor and the detection circuit; a solder bump formed on the dielectric film; and a pad electrode having a first portion connected to an output of the detection circuit in the through hole, and a second portion connected to the first portion and provided on a lower surface of the semiconductor substrate.
地址 Tokyo JP
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