SENSOR DEVICE INCLUDING ONE OR MORE METAL-DIELECTRIC OPTICAL FILTERS

摘要

A sensor device including one or more sensor elements and one or more optical filters is provided. The one or more optical filters each include a plurality of dielectric layers and a plurality of metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

主权项

1. A sensor device comprising:
one or more sensor elements; and one or more optical filters disposed over the one or more sensor elements, wherein each of the one or more optical filters includes:
a plurality of dielectric layers; anda plurality of metal layers stacked in alternation with the plurality of dielectric layers, wherein each of the plurality of metal layers has a tapered edge, at a periphery of the optical filter, that is protectively covered by one or more of the plurality of dielectric layers.