发明名称 ACTIVE ENERGY RAY CURABLE COMPOSITION FOR PHOTORESISTS
摘要 Provided is an active energy ray curable composition for photoresists, which has excellent heating stability and exhibits good curability when cured. An active energy ray curable composition for photoresists, which contains an acrylic copolymer resin (A), an acrylic copolymer resin (B) and a photopolymerization initiator (C), and wherein: the acrylic copolymer resin (A) has a (meth)acryloyl group and a carboxyl group in side chains; and the acrylic copolymer resin (B) has a (meth)acryloyl group and a carboxyl group in side chains, while having a resin skeleton which is different from that of the acrylic copolymer resin (A).
申请公布号 WO2017038329(A1) 申请公布日期 2017.03.09
申请号 WO2016JP72180 申请日期 2016.07.28
申请人 DAICEL-ALLNEX LTD. 发明人 SAGAMI, Takao
分类号 G03F7/038 主分类号 G03F7/038
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