| 发明名称 |
SUSCEPTOR WITH ASYMMETRIC RECESSES, REACTOR FOR EPITAXIAL DEPOSITION AND PRODUCTION METHOD |
| 摘要 |
This disclosure concerns a susceptor for a reactor for epitaxial deposition comprising a body having the shape of a horizontal disc; the body has a first upper face, a second lower face and a vertical symmetry axis of the body; the first face has a plurality of disc-shaped recesses each of which with a centroid and with a symmetry axis of the recess which passes through said centroid; a section of each of said recesses taken along any vertical plane which comprises said vertical symmetry axis of the body is asymmetric with respect to any axis; a section of each of said recesses taken along any vertical plane which is parallel to said vertical symmetry axis of the body and which is perpendicular to a radius of the body passing through the centroid of the recess is symmetric with respect to a vertical axis. |
| 申请公布号 |
US2017121846(A1) |
申请公布日期 |
2017.05.04 |
| 申请号 |
US201615342836 |
申请日期 |
2016.11.03 |
| 申请人 |
LPE S.p.A. |
发明人 |
OGLIARI Vincenzo;PRETI Silvio;COREA Francesco;PRETI Franco |
| 分类号 |
C30B25/12;C23C16/458;B28B17/00;C30B29/06 |
主分类号 |
C30B25/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Susceptor comprising a body having the shape of a horizontal disc, wherein said body has a first upper face, a second lower face and a vertical symmetry axis of the body, wherein said first face has a plurality of disc-shaped recesses, each of which with a centroid and with a symmetry axis of the recess which passes through said centroid;
wherein a section of each of said recesses taken along any vertical plane which comprises said vertical symmetry axis of the body is asymmetric with respect to any axis; wherein a section of each of said recesses taken along any vertical plane which is parallel to said vertical symmetry axis of the body and which is perpendicular to a radius of the body passing through the centroid of the recess is symmetric with respect to a vertical axis. |
| 地址 |
Baranzate (MI) IT |
