发明名称 |
CORROSION RESISTANT MEMBER AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A method for manufacturing a corrosion resistant member that includes a substrate including a ceramic or a metal, and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas. The corrosion resistant film contains yttria as a main component and further contains at least one of tantalum and niobium in an amount of 0.02 mol % to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film. The method includes mixing a raw material powder of yttria with a raw material powder of at least one of a tantalum oxide and a niobium oxide, followed by granulating the raw material powders to obtain a granulated powder. |
申请公布号 |
US2017121805(A1) |
申请公布日期 |
2017.05.04 |
申请号 |
US201715404427 |
申请日期 |
2017.01.12 |
申请人 |
COORSTEK KK |
发明人 |
MURATA Yukitaka;SASAKI Hitoshi;MATSUMOTO Shintaro |
分类号 |
C23C4/11;C04B35/622;C23C4/134;C04B41/87;C04B41/45;C04B35/505;C04B41/50 |
主分类号 |
C23C4/11 |
代理机构 |
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代理人 |
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主权项 |
1. A method for manufacturing a corrosion resistant member, the corrosion resistant member comprising:
a substrate comprising a ceramic or a metal; and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas, wherein the corrosion resistant film contains yttria as a main component and further contains at least one of tantalum and niobium in an amount of 0.02 mol % to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film, the method comprising:
mixing a raw material powder of yttria with a raw material powder of at least one of a tantalum oxide and a niobium oxide, followed by granulating the raw material powders to obtain a granulated powder; andspraying the granulated powder on a surface of the substrate comprising the ceramic or the metal by gas plasma spraying to form the corrosion resistant film. |
地址 |
Tokyo JP |