| 发明名称 |
ENHANCED LIFT PIN DESIGN TO ELIMINATE LOCAL THICKNESS NON-UNIFORMITY IN TEOS OXIDE FILMS |
| 摘要 |
Implementations disclosed herein generally provide a lift pin that can improve the deposition rate and uniform film thickness above lift pin areas. In one implementation, the lift pin includes a first end coupling to a shaft, the first end having a pin head, and the pin head having a top surface, wherein the top surface is planar and flat, and a second end coupling to the shaft, the second end having a flared portion, wherein the flared portion has an outer surface extended along a direction that is at an angle of about 110° to about 140° with respect to a longitudinal axis of the lift pin. |
| 申请公布号 |
US2017125280(A1) |
申请公布日期 |
2017.05.04 |
| 申请号 |
US201615333345 |
申请日期 |
2016.10.25 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
GHOSH Kalyanjit;KULKARNI Mayur G.;BALUJA Sanjeev;JHA Praket P.;NITTALA Krishna |
| 分类号 |
H01L21/687;C23C16/458;C23C16/52;H01L21/683 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A lift pin for positioning a substrate relative to a substrate support, the lift pin comprising:
a first end coupling to a shaft, the first end having a pin head, and the pin head having a top surface, wherein the top surface is planar and flat; and a second end coupling to the shaft, the second end being opposed to the first end and having a flared portion, wherein the flared portion has an outer surface extended along a direction that is at an angle of about 110° to about 140° with respect to a longitudinal axis of the lift pin. |
| 地址 |
Santa Clara CA US |
