FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES

摘要

Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.

主权项

1. A liner assembly for protecting an inner surface of a substrate process chamber, comprising:
a lower liner having a ring shaped body with an outer surface and an inner surface defining a processing volume, the ring shaped body having a plurality of gas passages therethrough, the plurality of gas passages connecting the outer surface to the processing volume; and an upper liner disposed above the ring shaped body, the upper liner including a plurality of flow guides aligned with the plurality of gas passages.